FU Li, WANG Chuanbin, HUANG  Pan, SHEN Qiang, ZHANG  Lianmeng

(State Key Lab of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology,Wuhan 430070)

Abstract:A well-crystallized, pure phase and high density ceramic target is necessary for preparing thin films by Physical Vapor Deposition. In the present study, a Bi₄Ti₃O₁₂ ceramic target was prepared by hot -press sintering, and the effects ofprocessing parameters on the phase, micros tructure and relative density of the target were investigated. Using Bi₂O₃ and TiO₂ powders as the raw materials, pure Bi₄Ti₃O₁₂ powders were synthesized at 800℃ by solid-state reaction. 3wt% excess of Bi₂O₃ could compensate for the severe volatilization of Bi during the sintering process. Pure phase and dense Bi₄Ti₃O₁₂ ceramic target was obtained at 850℃-30MPa-2h by hot-pressed sintering, which can be considered as a promising target for film deposition.

Keywords:Bi₄Ti₃O₁₂, ceramic target, hot-press sintering