YU Changfeng, ZHU Xiaoping, ZHANG Maiguo, LING Qing, DAI Jing
(1.Jingdezhen Ceramic Institute, 333001; 2. Foshan Jin'gang New Materials Institute, Foshan 52800; 3. Suzhou Guoju Electronic Ltd. Com., 21500)
Abstract: Transparent conductive film was prepared by sol-gel method. The effects of Sb-doping amount and heat treatment temperature on resistance and transmittance of the conductive film were studied. The results showed that with 1.0% (wt) amount of Sb-doping, a good continuous and dense SnO2 transparent conductive film was obtained with surface resistance down to p=16x10Ω•cm and transmittance up to 90%.
Keywords: SnO2 thin films, Sb-doping, transparent conductive film, sol-gel method, conductivity