ZHAO Wenjie 1, SHI Yunbo 2,3 ,XIU Debin 3, LEI Tingpin 1, FENG Qiaohua 3, WANG LiQuan 2
(1. College of Application Science, Harbin University of Science and Technology, Harbin 150080; 2. Mechanical Engineering Center for Post-doctoral Research Working Station, Harbin Engineering University, Harbin 150001; 3. College of Measure-Control Technology & Communication Engineering, Harbin University of Science and Technology, Harbin 150080)
Abstract: Aiming at detecting chlorine (Cl2) and adopting constant temperature chemical co-precipitation method, the study was made on how to make In-Nb compound semiconductor oxide gas sensor. The micro-property and sensitivity of In-Nb gas sensitivity material were analyzed and its gas sensitivity mechanism was also discussed. It is proved that the In-Nb material has a good sensitive property to Cl2.
Key words: In2O3, Nb2O5, gas sensitivity, chlorine gas sensor