LIN Wei 1,2,3, HUANG Shizhen 1,2,3, CHEN Wenzhe 1
(1. College of Material Science and Engineering of Fuzhou University, Fuzhou 350002; 2. College of Physics and Information Engineering of Fuzhou University, FuZhou 350002; 3. Fujian Key Laboratory of Microelectronics and Integrated Circuits, Fuzhou 350002)
Abstract: The carbon nanotubes-SnO2 film gas sensor was prepared by magnetron sputtering. Its sensitive responses to different gases were tested by SEM and XRD. The result indicated: the gas sensor has extremely high sensitivity to NO2, but is insensitive to other gases.
Key words: magnetron sputtering, carbon nanotubes, SnO2, gas sensor, NO2