LEI Tingping ¹, SHI Yunbo ^2,3, ZHAO Wenjie ¹, LI Zan ⁴, WANG Liquan ²

(1.School of Applied Sciences, Harbin University of Science and Technology, Harbin 150080;

2.School of Measurement Control Tech & Communications Engineering, Harbin University of Science and Technology,

Harbin 150080;3.Mechanical Engineering Center for Post-doctoral Studies, Harbin Engineering University, Harbin 150001;4.School of Life Science and Chemistry, Harbin University, Harbin 150086)

Abstract: With the introduction of ammonium molybdate solid phase catalysis and using tetrachlorophthalonitrile and urea as the raw materials, perchlorinated substituent zinc phthalocyanine (ZnPcCl₁₆) was synthesized, and characterized by IR and UVvis spectroscopy. Thin films of gas sensors were prepared in a vacuum evaporation system and evaporated onto SiO₂ substrates, where sensing electrodes were made by MEMS micromachining. The result showed that the sensors have an ideal sensitivity to Cl₂ gas.

Key words: perchlorinated substituent zinc phthalocyanine, characterization, gas sensitivity