LIN Wei ^{1, 2, 3}, HUANG Shizhen ^{1, 2, 3}, CHEN Wenzhe ¹

(1. College of Material Science and Engineering of Fuzhou University, Fuzhou 350002; 2. College of Physics and Information Engineering of Fuzhou University, Fuzhou 350002; 3. Funjian Key Laboratory of Microelectronics and Integrated Circuits,Fuzhou 350002)

Abstract: The influence on carbon nanotube-SnO₂ sensor's performance by changing the magnetron sputtering technological conditions was studied by analyzing the sensitivity response to NO₂ atmosphere of gas sensors fabricated under different conditions and with different film thicknesses. The experiment indicated: the technological conditions of magnetron sputtering has tremendous influence on the performance of gas sensors, the SnO₂ gas sensor prepared by radio frequency magnetron sputtering has good performance, and the optimal film thickness for gas sensors is about 30 nm.

Key words:  magnetron sputtering, carbon nanotubes, SnO₂, gas sensor