FENG Jinyuan, HAO Yanhua

(School of Physics, South China University of Technology, Guangzhou 510641)

Abstract: SnO₂ and SnO₂:Cu thin film are prepared by magnetic reactive sputtering and tested by AFM and XRD to analyze physical characters. The gas sensing optical properties of the film in the acetone are researched at the room temperature by UV spectrophotometer. It shows that a 20% change of reflectance was detected in some visible light spectrum.

Key words: R.F sputtering, SnO₂, acetone atmosphere, reflectance