WANG Wen, ZHOU Yu, JIA Dechang, YE Feng
( Harbin Institute of Technology)
Abstract: A stable sol and gel of SBT was prepard . Pentaethoxy tantalum, strontium acetate , and bismuth subnitrate were used as raw materials and methoxyethylene as solvent. The SBT sol was spin - coated onto Pt/Ti/SiO2/Si substrate . After annealing by rapid thermal treat at 800℃ , perovskie SBT thin flms was obtained. XRD result indicated that the thin films have high oriented texture at (115) and (008) orientaion. The remnant polarization and the saturated polarization were about 8. 8μC/cm2 and 5.2μC/cm2 , respectively .
Key words: sol - gel, SrBi2Ta2O9 , ferroelectric thin films