ZHAN Hongquan, SUN Yanping

(Jingdezhen Ceramic Ins titute, 333001)

Abstract: With WCl₂+C₂H₂+H₂reaction system, the nano tungs ten carbide microcrystal was prepared by radio frequency plasma chemical vapor depos ition (RF- PCVD). TEM results showed: the tungs ten carbide particle diameter was less than 100 nm, Its mean particle diameter was 50 nm . The theoretical analys is and experiment results showed : the tungs ten   carbide prepared by RF- PCVD was complex, including WC, W₂C, WC_{1- x}. WC was used as a hard alloy while W₂C and WC_{1- x} were good catalysts .

Keywords: RF- PCVD，nano，WC，W₂C，WC_{1- x}