LIXinqi, YAN Xiaomeng, FANG Junwu, DONG Binchao, GAO Pengzhao

(College of Materials Science and Engineering, Hunan University, Changsha 410082)

Abstract: The paper reviews the research of preparation, modification and formation mechanism of inorganic film in the recent decade. Preparation methods include sol-gel technology, chemical vapour deposition, anodic oxidation method, magnetron sputtering technology, spray pyrolysis , etal. The film formation mechanism contains chemical and physical process and the relevant mathematical models are established.

Key words: inorganic film, preparation process , film formation mechanism