NIE Jianhua, JIANG Sheng, WEN Jin, CAI Manfei, LIANG Yonghe, YIN Yucheng
(The State Key Laboratory of Refractories and Metallurgy, Wuhan University of Science and Technology, Wuhan 430081, Hubei, China)
Abstract: The micron Si2N2O was synthesized through nitride reaction of substance silicon and four kinds of silica as raw materials in vacuum induction furnace filled with highly pure nitrogen at 1460 ℃ for 3 hours. The phase composition and microstructure of the Si2N2O were analyzed by XRD, SEM, and TEM. Results show that the content of Si2N2O in the samples synthesized respectively from high purity quartz glass, analytically pure silica, quartz and silica fume as a silica source is more than 91%. The morphology of Si2N2O in the synthesized sample is columnar or lamellar. The atomic ratio in the product of Si2N2O is close to the atomic ratio of Si2N2O in theory.
Key words: silicon oxynitride; silica source; high temperature nitriding