YANG  Qinghua,  WANG  Huanping,  XU Shiqing

(College of Materials Science and Engineering, China Jiliang University, Hangzhou Zhejiang 310018, China)

Abstract:Aluminum nitride (AlN) ceramics have been used as substrate and packaging materials for high -performance electronic devices due to their high thermal conductivity, good electrical insulation, low dielectric constant and dielectric loss,and thermal expansion coefficient close to that of silicon. As the excellent properties of the aluminum nitride ceramics are based on the high quality of their powders, the preparation of high quality powders becomes the key technology. The development in the preparation technology of aluminum nitride powders has been discussed, and also the developing trends of the powders are prospected.

Keywords:aluminum nitride, preparation of powders, substrate materials