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Development of Electric Furnace for the Sintering of its Ceramic Targets1mpa Pure Oxygen at 1600℃

LI Jingqiao

（Yifeng Special Ceramics Kilns Co．‚Ltd．‚Changxing‚Zhejiang Province‚313100）

Abstract：This paper introduces the development of electric furnace for the firing of ITO ceramic targets．It describes the secure solution‚selection of key materials and the esigning characteristics of the pressure vessel．This electric furnace is considered to be the first sintering electric furnace with high pressure and pure oxygen．

Keywords：ITO‚sintered target‚pure oxygen‚high temperature‚electric furnace


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