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Influence of Phase Separation on Surface Roughness of SiO2 Thin Film

HOU Hefeng, TIAN Hui, CHEN Yuqing

(School of Material Science and Engineering, Shandon Ins titute of Light Indus try, 250100)

Abstract: Hydrophobic silica - based thin films were prepared by means of sol- gel process , phase separation and self- as sembly (SA). A thin film with desired surface roughness was obtained by mixture of HCl- catalyzed acid sol with NH4OH- catalyzed alkaline sol and phase separation of tetraethyl- orthos ilicate (TEOS) induced by addition of polyacrylic acid (PAA). After further modification by a self- as sembled monolayer, the film's wetting properties changed and became hydrophobic. Films with different PAA content showed different hydrophobicity.

Keywords: hydrophobic, sol- gel process , phase separation


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