CUI Jinghui 1, LI Qiang 1, XIA Jinfeng 2, FENG Tao 2
(1. Department of Chemistry, East China Normal University, Shanghai 200241; 2. Shanghai Institute of Ceramic, China Academy of Sciences, Shanghai 200050)
Abstract: Metal oxide semiconductor gas sensors are widely used as detecting gases. Meanwhile the factors that influence their gassensing property are sensitivity, selectivity, stability, response time and repetitiveness. Researchers are devoting themselves to improving the sensitivity of the gas sensors for their importance of measuring. The experiment results indicate that sensitivity is related to surface reaction, which is mainly influenced by chemical components, surface -modification,microstructure of a sensing film, temperature, and humidity.
Key words: metal oxide; gas sensor; sensitivity