LIU Ximei; HU Yuehui; CHEN Yichuan; MA Defu; XU Bin, ZHANG Zhiming

(School of Mechanical and Electrical Engineering, Jingdezhen Ceramic Institute, Jingdezhen 333403, Jiangxi, China)

Abstract: The Na-Mg co-doped ZnO thin fi lms were prepared by sol-gel method on the quartz glass with fi xed Mg content and changing Na content. The microstructure, surface topography and optical property of ZnO thin fi lms were characterized by X-ray diffraction (XRD), scanning electron microscope (SEM), UV-Visible spectrophotometer. The results indicated that the crystallinities of the fi lms were improved with the increasing of Na content, which is benefi cial to the preferred orientation of (002) crystal face; when the Na-Mg content was 1:1, the surfaces of the fi lms were smoother, the particles were more compact, and the transmittance of thin fi lm was about 88%, the forbidden bandwidth was 3.31 ev.

Key words: sol-gel method; co-doped; ZnO thin fi lms; microstructure; surface topography; optical property