MIAO Yanmei ¹, ZI Guangping ¹, YING Feifei ¹, WANG Kan ¹,WU Shaohua ²
(1. Yunnan Chihong International Germanium Co., Ltd., Qujing 655011, Yunnan, China; 2. Yunnan KIRO-CH Photonics Co., Ltd., Kunming 650223, Yunnan, China)

Abstract: Infrared zinc sulfide (ZnS) was successfully prepared by chemical vapor deposition (CVD), The compositions, phase structures, surface morphology and optical properties of the ZnS samples were characterized by X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), scanning electron microscopy (SEM) and Fourier infrared spectrometer (FTIR). The results show: the products are cubic structure ZnS when the deposition temperature is relatively low; with the increase of the deposition temperature, a small quantity of hexagonal structure ZnS is gradually produced. The atomic ratio of Zn/S in ZnS is greater than 1, the content of Zn in ZnS decreases with the increase of deposition temperature. Increasing deposition temperature can inhibit the formation of ZnH₂, and the optical properties of ZnS will be reduced at high deposition temperature. The ZnS has a small number of micro pores and good optical performance when the deposition temperature is 620 ℃.
Key words: chemical vapor deposition (CVD); zinc sulfide (ZnS); deposition temperature