FAN Liqin
(School of Xiamen Institute of Technology, Xiamen 361021, Fujian,China)

Abstract: Al film on glass was prepared by radio frequency magnetron sputtering, and the AZO film was prepared on the Al film to improve its stability. The effect of Al film thickness on the electrical and optical properties of AZO films has been studied. Results show that the AZO/Al/glass bi-layer films have the highest figure of merit of 26.68×10^-6 Ω-1, with the lowest sheet resistance of 500Ω/sq and the highest average transmittance in the visible sepectral region of 64.95% when the thickness of Al films is 7 nm.

Key words: aluminum-doped zinc oxide film; sputtering power; electrical properties; optical properties