ZHANG Ergeng, HUANG Biao, ZHOU Qiong
(School of Mechanical Engineering, Shanghai Institute of Technology, Shanghai 201418, China)

Abstract: TaC (Tetrahedral amorphous carbon) has excellent physical and chemical properties, such as the high oxidation resistance, high hardness, high melting point, good resistance to chemical corrosion and thermal shock performance. It is widely used in the manufacture of such artifacts as cutting tools, grinding tools, and bearings. Due to the influence of substrate surface condition, materials and deposition process conditions, the TaC coating has different surface morphology and preferred orientation. Different substrate surface condition with different deposition temperature is the key to the successful preparation of TaC film with good combination property. The preparation and the performance of TaC and its the application in such field as the auto parts, metal processing, aerospace are discussed in this paper. The prospects of the application and development of TaC coating are also predicted.

Key words: tantalum carbide; coating; high temperature resistance; deposition