LAO Zixuan, HU Yuehui, CHEN Yichuan, FAN Jianbin, SHUAI Weiqiang, TONG Fan
(Department of Mechanical and Electronic Engineering, Jingdezhen Ceramic Institution, Jingdezhen 333403, Jiangxi, China)

Abstract: Mg-Al Co-doped ZnO thin films were prepared on quartz substrates by sol gel method. The effects of different spin coating layers on the microstructure, surface morphology and optical properties of ZnO thin films were studied. The samples were characterized and tested by X-ray diffraction (XRD), scanning electron microscope (SEM), ultraviolet visible spectrophotometer (UV-VIS) and PL photoluminescence spectrometer. The experimental results show that the ZnO thin films have hexagonal wurtzite structure preferentially oriented in c-axis direction. The increase of thin film layers can effectively improve the crystallinity of the thin films. At the same time, Mg-Al co-doping can greatly broaden the optical transmittance of ZnO thin films in the near infrared spectral domain, and the average transmittance is more than 85%.

Key words: sol-gel; Mg-Al co-doped; ZnO thin films; optical properties